THIN FILM
Rigaku Smartlab Diffractometer (2018)
This equipment is mainly dedicated to the measurement of thin films (polycrystalline, monocrystalline or amorphous), which can be textured or epitaxial, at room temperature or temperature.
Its main advantages are:
• Intensity of its X-ray beam (rotating anode) leading to a counting statistic that allows fast acquisitions with high resolution
• Optical recognition of the motorized optics for their automatic alignment
• High-resolution parallel beam measurements and in plane configuration (measurements on planes whose normal is not perpendicular to the surface being analysed) allowing the study of crystal structure of highly perfect epitaxial materials, in-plane reciprocal space maps and full pole figures.
• High-resolution 2D detector allowing in situ ultra-fast data collection (a few tens of seconds) for phase change kinetics studies
• High optical modularity, which allows the analysis of any type of sample, even in very small quantities:
- Powder X-ray diffraction – for phase identification and quantitative analysis of mixtures
- High-resolution X-Ray diffraction on thin films for the analysis of
1) their crystallographic structure,
2) their preferred orientation (texture analysis, in and out-of-plane pole figures)
3) their crystal quality (rocking curve/reciprocal space mapping RSM)
- Grazing incidence X-ray diffraction GIXRD – for crystalline thin films measurements
- X-ray reflectometry XRR – for determination of crystalline or amorphous thin films thickness
Technical description of the machine : Smartlab
Dedicated softwares:
• Analysis of polycrystalline powders and films: PDXL2 (Rigaku)
• XRR, RSM et pole figures: LEPTOS (Bruker AXS), GlobalFit and 3D Explore (Rigaku), PARRAT
• Texture analysis: MULTEX (Bruker AXS)