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Epitaxy by PECVD at 200°C

Nanosil PVSiXT (TOTAL)

Responsable: Erick Johnson

The activities of the NanoSil group can be tracked back to the origin of LPICM, motivated by the production of hydrogenated amorphous silicon by plasma enhanced chemical vapor deposition and its application to PIN solar cells.
Since then, the group has expanded its activities both on this subject (expanding further towards plasma processing studies and plasma sources in the upstream direction, and towards modules in the downstream direction), but also laterally to other materials, device structures, and processing techniques. The activities of the NanoSil group during the evaluation period can be divided in the following scientific subjects:
  •  Plasma Processing Fundamental Studies
    • Ab-initio molecular dynamics studies of plasma species (clusters and aromatic silicon molecules)
    • Novel silicon and silicon alloy PECVD chemistries (SiF4) and deposition processes (low temperature epitaxy)
    • Fluid modeling of plasma processes for deposition and spectroscopy (Glow discharge mass spectrometry)
    • New Plasma Enhanced Chemical Vapour Deposition (PECVD) sources (microwave, tailored waveforms)
    • Advanced plasma characterization techniques (corona discharge probe) and in-situ materials
      characterization thanks to in-house developed techniques (spectroscopic ellipsometry, photoluminescence, TRMC …)
  • Thin Film Electronic Materials and Device Fabrication and Characterization
    • Photovoltaics
      • Thin film amorphous, polymorphous, and microcrystalline silicon and silicon alloys, including supporting technologies (transparent conductive oxides, flexible substrates, semi-transparent devices for consumer electronics
      • Wafer-based PV devices (heterojunctions), including photo- and electroluminescence
      • Low temperature PECVD Homo- and hetero-epitaxy devices (Si, SiGe, Ge and Si on III-V)
      • Nanowire devices : Radial junctions and light-trapping with nanowire arrays
    • Electronics
      • Nanowire-based sensors and transistors
      • Thin-film electroluminescent diodes

The following figure shows a schematic representation of research activities in NanoSil research group within research value chain.

- See more at: https://portail.polytechnique.edu/lpicm/fr/les-equipes/nanosil-pvsixt-to...