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The activities of the NanoSil group can be tracked back to the origin of LPICM, motivated by the production of hydrogenated amorphous silicon by plasma enhanced chemical vapor deposition and its application to PIN solar cells.
Since then, the group has expanded its activities both on this subject (expanding further towards plasma processing studies and plasma sources in the upstream direction, and towards modules in the downstream direction), but also laterally to other materials, device structures, and processing techniques. The activities of the NanoSil group during the evaluation period can be divided in the following scientific subjects:
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